MAPEX Instrument Database
Low-energy electron microscopy is a full-field diffractive imaging technique that allows imaging the morphology and surface structure of a crystalline sample at a lateral resolution down to about 10 nm for fields of view in the range of 3 to 50 microns at video rates (~10 Hz). Vertical resolution is limited to imaging of atomic surface steps. Preferred sample characteristics: flat, mono- or polycrystalline specimens up to 9x9 mm2, thickness up to 2 mm; temperature range during operation: 300 - 1300 K; gas dosing from ultra-high vacuum up to 10-4 mbar during operation.
04: LEEM - LOW ENERGY ELECTRON MICROSCOPY
Flege, Jan Ingo