Angle-resolved STEM using an iris aperture: Scattering contributions and sources of error for the quantitative analysis in Si
Tim Grieb , Florian F. Krause , Knut Müller-Caspary, Saleh Firoozabadi, Christoph Mahr , Marco Schowalter , Andreas Beyer, Oliver Oppermann , Kerstin Volz, Andreas Rosenauer Ultramicroscopy 221 (2021):