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MAPEX Instrument Database

Confocal microscope

General information

Description
Keyence VK-9700 3D Laserscan Color Microscope
Manufacturer
Keyence
Location
--
BIAS
Micro- and Nano-Optics LION
Category
Microscopy, Surface Analytics
MAPEX Category
Dimensional Properties, Material Properties, Surface / Interface Characterization
Keywords
Layer thickness, Roughness, 3D, Profile, Confocal microscopy
Measured Quantity
Surface roughness, Profile measurements, 3D measurements, Layer thickness
Main Application
Measurement of surface profiles, surface roughness, 3D surface and volume, object heigth and width.
Features
True color images with focus in entire field of view.
Year of Fabrication
2014

Instrument specification

Specifications

Magnification: 200x - 18.000x, Axial resolution: 1 nm, Objectives: 10x, 20x, 50x long distance, 100x long distance, 150x long distance, Laser: 408 nm, Roughness measurements according to ISO 25178 and ISO 4287:1997.

Contact

Contact person

Claas Falldorf
BIAS
falldorf@bias.de
www.bias.de

Reiner Klattenhoff
BIAS
FZB HB 1080
Phone +49-421-218-58073
klattenhoff@bias.de
www.bias.de

Principal Investigator
Bergmann, Ralf
Aktualisiert von: MAPEX