Instrument Database

Other

Elphy MultiBeam

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General information

  • Investigation area
  • Techniques
    Nanopatterning and Lithography
  • Manufacturer
    Raith
  • Fabrication year
    2014
  • Main application
    FIB-SEM nanolithography and nanopatterning, SEM lithography, (3D) rapid nano prototyping

Instrument specification

    Contact

    Instrument location

    • Institute
      BIAS
    Updated by: MAPEX