Instrument Database
Other
Elphy MultiBeam
General information
- Investigation area
- TechniquesNanopatterning and Lithography
- ManufacturerRaith
- Fabrication year2014
- Main applicationFIB-SEM nanolithography and nanopatterning, SEM lithography, (3D) rapid nano prototyping
Instrument specification
Contact
- Application scientistReiner Klattenhoff
, BIAS
FZB HB 1080
Phone number +49-421-218-58073
klattenhoffprotect me ?!biasprotect me ?!.de - Principal investigatorBergmann, Ralf
Instrument location
- InstituteBIAS