General information

• Investigation area

  Other
• Techniques

  Confocal Microscopy
  
• Manufacturer

  Keyence
• Fabrication year

  2014
• Measured quantity

  Surface roughness, Profile measurements, 3D measurements, Layer thickness
• Main application

  Measurement of surface profiles, surface roughness, 3D surface and volume, object heigth and width.

Instrument specification

• Technical aspects

  Magnification: 200x - 18.000x

  Axial resolution: 1 nm

  Objectives: 10x, 20x, 50x long distance, 100x long distance, 150x long distance

  Laser: 408 nm

  Roughness measurements according to ISO 25178 and ISO 4287:1997.

Contact

• Application scientist

  Claas Falldorf
  
  Coherent Optics and Nanophotonics, BIAS
  Phone number
  falldorfprotect me ?!biasprotect me ?!.de
• Reiner Klattenhoff
  , BIAS
  FZB HB 1080
  Phone number +49-421-218-58073
  klattenhoffprotect me ?!biasprotect me ?!.de
• Principal investigator

  Bergmann, Ralf
  

Instrument location

• Group

  Micro- and Nano-Optics
• Building

  LION
• Institute

  BIAS