Instrument Database
Electron Microscopy
Auriga 40 Scanning Electron Microscope
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General information
- Investigation area
- TechniquesScanning Electron Microscopy
- ManufacturerZeiss
- Fabrication year2012
- Measured quantityDimensions, surface morphology, composition
- Main applicationMicroscopy with up to nm resolution, material characterization
- Correlated workflow availableYes
Instrument specification
- Technical aspects
Auriga 40 from Zeiss - FIBSEM - with energy dispersive X-ray spectroscopy (EDS) from Oxford - X-max 150, In-lens-detector for high resolution, energy selective backscatter electron (EsB)-detector for low kV-range, charge compensation (CC), backscatter detector for high kV range
holders for 4 and 6 inch wafers, 9-stub-holder for 12,5 mm diameter pin stubs, holder for one dove tail stub
- Correlated workflowX-ray microscopy (XRM)
- Additional measurement possibilitiesLift-out system for TEM lamella preparation
Contact
- Application scientistEva-Maria Meyer
Fachbereich 1
NW1 O 01120
Phone number 0049-421-218-62617
emeyerprotect me ?!imsas.uni-bremenprotect me ?!.de - Daniel Gräbner
Fachbereich 1
NW1 Raum O 1040
Phone number 0049-421-218-62575
dgraebnerprotect me ?!imsas.uni-bremenprotect me ?!.de - Principal investigatorBergmann, Ralf
Lang, Walter
Instrument location
- BuildingNW1
- RoomO0080
- FacultyFachbereich 1
- Institute UniversityIMSAS