Angle-dependence of ADF-STEM intensities for chemical analysis of InGaN/GaN
study the scattered intensity in an InGaN layer buried in GaN as a function of the scattering angle. We achieved angular resolution with a motorized iris aperture in front of the ADF detector. Using this [...] Krause, Knut Müller-Caspary, Jan Philipp Ahl, Marco Schowalter , Oliver Oppermann, Joachim Hertkorn, Karl Engl, Andreas Rosenauer Ultramicroscopy (2022) 238, 113503 https://doi.org/10.1016/j.ultramic.2022 [...] various angular ranges agree with multislice simulations in the frozen-lattice approximation. We observed a strong influence of relaxation induced surface-strain fields on the ADF intensity, measured its angular