Publications research group Eickhoff
264-268.1101 Rapid plasma etching of cubic SiC using NF 3 /O 2 gas mixtures Christoph Richter, Klaus Espertshuber, Christoph Wagner, Martin Eickhoff, Gerhard Krötz Materials Science and Engineering: B [...] Tim Grieb, Florian F. Krause, Knut Müller-Caspary, Robert Ritz, Martin Simson, Jörg Schörmann, Christoph Mahr, Jan Müßener, Marco Schowalter, Heike Soltau, Martin Eickhoff, Andreas Rosenauer Ultramicroscopy [...] Röppischer, Rüdiger Goldhahn, Carsten Buchheim, Florian Furtmayr, Thomas Wassner, Martin Eickhoff, Christoph Cobet, Norbert Esser Physica Status Solidi A 206 , 773 (2009) DOI : 10.1002/pssa.200881406 Triple-twin