Laboratories
from a thermal cracker. The base pressure of around 5×10-11 mbar is achieved using rotary pumps, turbo molecular pumps, an ion getter pump and a titanium sublimation pump. X-ray photoemission electron [...] e to typically 1200°C. The base pressure of around 1×10 -10 mbar is achieved using rotary pumps, turbo molecular pumps, an ion getter pump and a titanium sublimation pump.