Publications
Lang, W. Benecke, M. Kehlenbeck and J. Koblitz (2007). "Vapour-Phase Self-Assembled Monolayers for Anti-Stiction Applications in MEMS." IEEE Journal of Microelectromechanical Systems (JMEMS) 16(6): 1451-1460 [...] J. Koblitz (2006). "Thermal stability of vapor phase deposited self-assembled monolayers for MEMS anti-stiction." Journal of Micromechanics and Microengineering 16: 2259-2264. Jedermann, R., C. Behrens