Publications research group Eickhoff
264-268.1101 Rapid plasma etching of cubic SiC using NF 3 /O 2 gas mixtures Christoph Richter, Klaus Espertshuber, Christoph Wagner, Martin Eickhoff, Gerhard Krötz Materials Science and Engineering: B [...] Karg, Florian F. Krause, Manuel Alonso-Orts, Sushma Raghuvansy, Martin S. Williams, Tim Grieb, Christoph Mahr, Thorsten Mehrtens, Martin Eickhoff, Andreas Rosenauer Journal of Applied Physics 138 , 115106 [...] Tim Grieb, Florian F. Krause, Knut Müller-Caspary, Robert Ritz, Martin Simson, Jörg Schörmann, Christoph Mahr, Jan Müßener, Marco Schowalter, Heike Soltau, Martin Eickhoff, Andreas Rosenauer Ultramicroscopy