MAPEX Instrument Database
E-beam lithography
General information
Description
Elphy MultiBeam
Manufacturer
Raith
Category
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MAPEX Category
Material Properties, Dimensional Properties, Surface / Interface Characterization
Keywords
Nanopatterning, Lithography, FIB, SEM, Material manipulation, Structure fabrication, Surface modification, Structure design
Main Application
FIB-SEM nanolithography and nanopatterning, SEM lithography, (3D) rapid nano prototyping
Features
Ion beam and electron beam milling, etching and deposition. 3D ion beam and electron beam lithography.
Year of Fabrication
2014
Contact
Contact person
Reiner Klattenhoff
-- / BIAS
FZB HB 1080
Phone +49-421-218-58073
klattenhoff@bias.de
www.bias.de
Principal Investigator
Bergmann, Ralf