Publikationen AG Eickhoff
264-268.1101 Rapid plasma etching of cubic SiC using NF 3 /O 2 gas mixtures Christoph Richter, Klaus Espertshuber, Christoph Wagner, Martin Eickhoff, Gerhard Krötz Materials Science and Engineering: B [...] Figge, Kazuki Nomoto, Huili Grace Xing, Darrell G. Schlom, Andreas Rosenauer, Debdeep Jena, Patrick Vogt APL Materials 12 , 019902 (2024) DOI: 10.1063/5.0192370 Growth, catalysis, and faceting of α-Ga2O3 [...] Karg, Sushma Raghuvansy, Jon P. McCandless, Debdeep Jena, Andreas Rosenauer, Martin Eickhoff, Patrick Vogt APL Materials 12 , 011120 (2024) DOI: 10.1063/5.0180041 2023 Growth and characterization of sputt